发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 Provided are a semiconductor device including an interposer having a relatively thin thickness without a through silicon via and a method of manufacturing the same. The method of manufacturing a semiconductor device includes forming an interposer including a redistribution layer and a dielectric layer on a dummy substrate, connecting a semiconductor die to the redistribution layer facing an upper portion of the interposer, encapsulating the semiconductor die by using an encapsulation, removing the dummy substrate from the interposer, and connecting a bump to the redistribution layer facing a lower portion of the interposer.
申请公布号 US2017125264(A1) 申请公布日期 2017.05.04
申请号 US201715397052 申请日期 2017.01.03
申请人 Amkor Technology, Inc. 发明人 Do Won Chul;Park Doo Hyun;Paek Jong Sik;Lee Ji Hun;Seo Seong Min
分类号 H01L21/48;H01L23/00;H01L23/498;H01L21/56;H01L21/683 主分类号 H01L21/48
代理机构 代理人
主权项
地址 Tempe AZ US