SEMICONDUCTOR CRYSTAL SUBSTRATE, SEMICONDUCTOR DEVICE, METHOD FOR PRODUCING SEMICONDUCTOR CRYSTAL SUBSTRATE, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE

摘要

A semiconductor crystal substrate includes a substrate, a first semiconductor layer including a nitride semiconductor and formed over the substrate, a second semiconductor layer including a nitride semiconductor and formed over the first semiconductor layer, a first cap layer formed on the second semiconductor layer, and a second cap layer formed on the first cap layer. Each of the first semiconductor layer and the second semiconductor layer has a single-crystal structure, the first cap layer has one of a single-crystal structure and a polycrystalline structure, and the second cap layer has an amorphous structure.

主权项

1. A semiconductor crystal substrate, comprising:
a substrate; a first semiconductor layer including a nitride semiconductor and formed over the substrate; a second semiconductor layer including a nitride semiconductor and formed over the first semiconductor layer; a first cap layer formed on the second semiconductor layer; and a second cap layer formed on the first cap layer, wherein each of the first semiconductor layer and the second semiconductor layer has a single-crystal structure; the first cap layer has one of a single-crystal structure and a polycrystalline structure; and the second cap layer has an amorphous structure.