SENSOR DEVICE WITH BAW RESONATOR AND THROUGH-SUBSTRATE FLUIDIC VIAS

摘要

A fluidic device incorporating a substrate, at least one bulk acoustic wave (BAW) resonator structure, and a fluidic channel bound at least in part by the at least one BAW resonator structure. The fluidic device further includes at least one fluidic via defined through at least a portion of the substrate, thereby permitting fluidic connections and electrical connections to be provided on opposing upper and lower surfaces of the fluidic device. The at least one BAW resonator structure may include a piezoelectric material comprising a c-axis having an orientation distribution that is predominantly non-parallel to normal of a face of the substrate, and may be overlaid with a functionalization material (e.g., a specific binding material overlying a self-assembled monolayer) to enable detection of a target species in a sample supplied to the fluidic device.

主权项

1. A fluidic device comprising:
a base structure comprising: (i) a substrate; (ii) at least one bulk acoustic wave resonator structure arranged over at least a portion of the substrate, the at least one bulk acoustic wave resonator structure including a piezoelectric material comprising a c-axis having an orientation distribution that is predominantly non-parallel to normal of a face of the substrate, a top side electrode arranged over a portion of the piezoelectric material, and a bottom side electrode arranged between the piezoelectric material and the substrate, wherein a portion of the piezoelectric material is arranged between the top side electrode and the bottom side electrode to form an active region; and (iii) a functionalization material arranged over at least a portion of the active region; a fluidic channel bounded at least in part by the base structure; and at least one fluidic via defined through at least a portion of the base structure including the substrate and in fluid communication with the fluidic channel.