发明名称 |
ELECTRONIC COMPONENT MANUFACTURING METHOD, VIBRATOR DEVICE, ELECTRONIC APPARATUS, AND VEHICLE |
摘要 |
An electronic component manufacturing method, in which a notch and a concave portion are formed in a substrate, includes forming an etching mask in which a maximum width of a first mask portion which forms a width between two side surfaces of the concave portion along a longitudinal direction, when the substrate is seen in a plan view from a direction perpendicular to a surface of the substrate having the concave portion formed therein, is smaller than a width of a second mask portion which forms a minimum width of an opening of the notch, and forming the notch and the concave portion by performing dry etching processing on the substrate. |
申请公布号 |
US2017126200(A1) |
申请公布日期 |
2017.05.04 |
申请号 |
US201615299218 |
申请日期 |
2016.10.20 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
MATSUO Atsushi;KIKUCHI Takayuki |
分类号 |
H03H9/215;H03H9/17;H03H3/02;H03H9/05 |
主分类号 |
H03H9/215 |
代理机构 |
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代理人 |
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主权项 |
1. An electronic component manufacturing method in which a notch and a concave portion are formed in a substrate, the method comprising:
forming an etching mask in which a maximum width of a first mask portion which forms a width between two side surfaces of the concave portion along a longitudinal direction, when the substrate is seen in a plan view from a direction perpendicular to a surface of the substrate having the concave portion formed therein, is smaller than a width of a second mask portion which forms a minimum width of an opening of the notch; and forming the notch and the concave portion by performing dry etching processing on the substrate. |
地址 |
Tokyo JP |