HINGED MEMS DIAPHRAGM AND METHOD OF MANUFACTURE THEREOF

摘要

A method of forming a micromechanical structure comprising, forming a sacrificial layer on a surface and walls of a trench in a substrate; depositing a structural layer over the sacrificial layer, extending into the trench, selectively etching the structural layer to define a pattern having a boundary, at least a portion of the structural layer overlying a respective portion of the trench being removed and at least a portion of the structural layer extending into the trench being preserved at the boundary; and removing at least a portion of the sacrificial layer from underneath the structural layer, prior to removal of at least a portion of the sacrificial layer extending into the trench at the structural boundary. A micromechanical structure formed by the method is also provided.

主权项

1. A method of forming a micromechanical structure, comprising:
forming a sacrificial layer on a surface of a substrate and walls of at least one trench formed in the substrate; depositing a structural layer over the sacrificial layer, extending into the at least one trench, the structural layer having a different residual compressive stress than the sacrificial layer; selectively etching the structural layer to define a pattern having a boundary, at least a portion of the structural layer overlying a respective portion of the at least one trench being removed and at least a portion of the structural layer extending into the at least one trench being preserved at the boundary; and removing at least a portion of the sacrificial layer from underneath the structural layer, prior to removal of at least a portion of the sacrificial layer extending into the at least one trench at the structural boundary.