| 主权项 |
1. An electrostatically actuated oscillating structure, comprising:
a fixed support body forming a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion; a first torsional elastic element and a second torsional elastic element mechanically coupled, respectively, to the first and second rotor subregions and defining an axis of rotation parallel to a first direction of an orthogonal reference system; and a mobile element arranged between, and connected to, said first and second torsional elastic elements, the mobile element being rotatable about the axis of rotation as a result of a torsion of the first and second torsional elastic elements; wherein the first and second stator subregions are electrostatically coupled to respective first and second regions of actuation of the mobile element, which are diametrically opposite to one another with respect to the axis of rotation; said first and second regions of actuation of the mobile element including a respective plurality of first and second elongated elements, which extend in cantilever fashion towards the first and second stator subregions, respectively; said first and second stator subregions including a respective plurality of third and fourth elongated elements comb-fingered to the first and second elongated elements, respectively; and at least an element of structural asymmetry comprising a recess extending, at least in part, in the fourth elongated elements for reducing the extension of the fourth elongated elements, in such a way that a surface available for said electrostatic coupling between the third elongated elements and the first elongated elements is greater than a surface available for the electrostatic coupling between the fourth elongated elements and the second elongated elements. |
