WIRING BOARD FOR DEVICE TESTING

摘要

Disclosed is a wiring board for simultaneously testing of multiple semiconductor devices. The wiring board includes a multilayer ceramic substrate, an organic wiring structure arranged on the multilayer ceramic substrate, a plurality of capacitor connection pads formed on the organic wiring structure and a plurality of test pads formed on the organic wiring structure. The organic wiring structure has a plurality of inner conductor layers including first and second plane layers. Each of the first plane layers is divided in a plurality of regions. Each of the second plane layer(s) is placed in a different layer from the first plane layers and made larger in area than the first plane layers. At least a part of the test pads of each test pad group is electrically connected to at least a part of the connection pads via an outermost one of the first plane layers.

主权项

1. A wiring board for simultaneous testing of multiple semiconductor devices, comprising:
a multilayer ceramic substrate having a plurality of ceramic layers and a plurality of conductor layers alternately stacked to each other; an organic wiring structure arranged on a main surface of the multilayer ceramic substrate; a plurality of connection pads formed on a surface of the organic wiring structure for connection to capacitors; and a plurality of test pad groups formed on the surface of the organic wiring structure, each of the test pad groups having a plurality of test pads for testing of any one of the semiconductor devices, the organic wiring structure having a plurality of insulating resin layers and a plurality of inner conductor layers alternately stacked to each other such that one of the plurality of insulating resin layers is located outermost of the organic wiring structure, the plurality of inner conductor layers including a plurality of first plane layers and one or more second plane layers, each of the plurality of first plane layers being divided in a plurality of regions as viewed from the surface of the organic wiring structure, each of the one or more second plane layers being placed in a different layer from the first plane layers and having an area larger than that of the first plane layer as viewed from the surface of the organic wiring structure, at least a part of the test pads of each of the test pad groups being electrically connected to at least a part of the connection pads via an outermost one of the first plane layers.