SYSTEMS AND METHODS FOR FILTERING RADIO FREQUENCIES FROM A SIGNAL OF A THERMOCOUPLE AND CONTROLLING A TEMPERATURE OF AN ELECTRODE IN A PLASMA CHAMBER

摘要

A circuit including a first filter assembly and a controller. The first filter assembly is implemented on a printed circuit board. The first filter assembly includes a first filter and a second filter. The first filter receives a first signal from a first sensor, prevents passage of a first portion of the first signal and outputs a second signal. The first portion of the first signal is at a first radio frequency. A second portion of the first signal is indicative of a first temperature of a first electrode in a plasma chamber. The second filter receives the second signal and prevents passage of a portion of the second signal. The portion of the second signal is at a second radio frequency. The second radio frequency is less than the first radio frequency. The controller adjusts a temperature of the first electrode based on an output of the second filter.

主权项

1. A circuit comprising:
a first filter assembly implemented on a printed circuit board, the first filter assembly comprising
a first filter configured to (i) receive a first signal from a first sensor, (ii) prevent passage of a first portion of the first signal, and (iii) output a second signal, wherein the first portion of the first signal is at a first radio frequency, and wherein a second portion of the first signal is indicative of a first temperature of a first electrode in a plasma chamber, anda second filter configured to (i) receive the second signal, and (ii) prevent passage of a portion of the second signal, wherein the portion of the second signal is at a second radio frequency, and wherein the second radio frequency is less than the first radio frequency; and a controller configured to adjust a temperature of the first electrode based on an output of the second filter.