发明名称 ADSORBENT-BASED PRESSURE STABILIZATION OF PRESSURE-REGULATED FLUID STORAGE AND DISPENSING VESSELS
摘要 A fluid supply package is described, including a pressure-regulated fluid storage and dispensing vessel comprising a fluid dispensing flow path, and adsorbent disposed in the flow path or in fluid communication therewith to reversibly adsorb fluid from the flow path for pressure stabilization of fluid dispensed from the vessel. A corresponding method is disclosed, of stabilizing fluid pressure during dispensing of fluid through a fluid flow path in a fluid supply package, by contacting the fluid in the fluid flow path with an adsorbent on which the fluid is reversibly adsorbable during the dispensing of fluid. Such approach of using a pressure management adsorbent stabilizes fluid pressure during fluid dispensing, and combats pressure oscillations that may occur during initiation or subsequent performance of fluid dispensing.
申请公布号 US2017122496(A1) 申请公布日期 2017.05.04
申请号 US201515317821 申请日期 2015.06.11
申请人 ENTEGRIS, INC. 发明人 Scannell Chris
分类号 F17C13/04 主分类号 F17C13/04
代理机构 代理人
主权项 1. A fluid supply package comprising a pressure-regulated fluid storage and dispensing vessel comprising a fluid dispensing flow path, and adsorbent disposed in the flow path or in fluid communication therewith to reversibly adsorb fluid from the flow path for pressure stabilization of fluid dispensed from the vessel.
地址 Billerica MA US