主权项 |
1. An ozone generation device, comprising:
a cylindrical tank-shaped container; a plurality of electrode tubes arranged in parallel inside this tank-shaped container, such that the length direction of the electrode tubes follows the axial direction of the tank-shaped container; discharge tubes arranged inside these electrode tubes, each forming a discharge gap; a pair of end plates that penetrate and hold both end section of the plurality of electrode tubes; a cooling space formed by this pair of end plates and the inner surface of the tank-shaped container divided between this pair of end plates; a cooling medium inlet formed in a lower section on one end side of this cooling space; a cooling medium outlet formed in an upper section on the other end side of this cooling space; a raw material gas inlet provided in an end section side in the axial direction of the tank-shaped container, that introduces the raw material gas and causes same to be send from the other end side of the discharge tubes to the discharge gaps; and ozone gas outlet provided on the opposite side in the axial direction of the tank-shaped container, being an outlet for ozone gas generated from the raw material gas by silent discharge in the discharge gaps; and providing an electrode tube in which a discharge tube is not arranged, among the plurality of electrode tubes, that have surrounding coolant medium that reaches at least a prescribed temperature as a result of the silent discharge. |