| 摘要 |
A deflecting mirror is in the optical path between a monocular microscope for viewing the region of a layer on which an X-ray beam falls, and the region of a layer, the thickness of which is measured according to the X-ray fluroescence principle. The mirror is in an apparatus that has an X-ray beam generator which emits an X-ray beam along a longitudinal geometrical axis, a table device arranged to support the layer, a diaphragm device of a material which absorbs X-rays, having an aperture which is in the longitudinal geometrical axis, and a light source which can be directed onto the region for the layer. The mirror is composed of glass and has a hole at 45 DEG to the plane of the mirror. The longitudinal geometrical axis of the X-ray beam passes through the hole.
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