| 摘要 |
PURPOSE:To prevent the leakage of a liquid, in a filter for removing fine solid particles from chemicals used during the preparation of IC or LSI, by fixing a cartridge, which is formed by integrally fixing a plurality of filter tubes of a tubular filter made of a fluorine contained resin to two fixing plates by welding, in a liquid-tight state by O-rings. CONSTITUTION:Each filter tube consists of an inner tube having a large number of orifices, a cylindrical filter membrane 13 and an outer tube 14 having a large number of orifices and both ends of the cylindrical filter membrane 13 are fixed in a liquid-tight state by shrinking tubes 15 which both ends of the outer tube 14 are also fixed by shrinking tubes 16. A plurality of the filter tubes 11 are integrally fixed to fixing plates 17, 18 by welding so as to pierce both of them to constitute a cartridge 30. The inner diameter of an outer tube 22 has a size capable of inserting the fixing plate 17 and one end 25 of the outer tube 22 is made larger than the inner diameter thereof so as to inlay the other fixing plate 18. In addition, ring shaped grooves 26, 27, 28 and a ring shaped notch 29 for O- rings are provided to the outer tube 22.
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