| 主权项 |
1. A sensing assembly device comprising: a substrate; a chamber above the substrate; a first piezoelectric gyroscope sensor positioned within the chamber; and a first accelerometer positioned within the chamber, wherein the chamber is pressurized to a pressure sufficient to provide damping for the first accelerometer; the first piezoelectric gyroscope comprises: a first and second support beam, each of the first and second support beams having a respective pair of piezoelectric drive elements; a first and second secondary support beams supported by the first support beam; a third and a fourth secondary support beam supported by the second support beam; a seismic mass supported by the first, second, third, and fourth secondary support beams; and four piezoelectric sense elements, each of the four piezoelectric sense elements located on a respective one of the first, second, third, and fourth secondary support beams. |
