System, devices and methods for measuring differential and absolute pressure utilizing two MEMS sense elements

摘要

Featured are systems and methods for measuring differential and absolute pressure of a flowing fluid/gas in a fluid system. In such a method the fluid system is configured with first and second pressure taps that are spaced from each so the second pressure tap is downstream of the first pressure tap in a direction of flow. An absolute pressure sense element and a differential pressure sense element are provided, where the absolute pressure sense element is first fluidly coupled to one of the first or second pressure tap to measure an absolute pressure representative of the flowing fluid/gas. The differential pressure sense element is second fluidly coupled to each of the first and second pressure taps so as to measure a differential pressure of the flowing fluid/gas between the first and second pressure taps.

主权项

1. A method for measuring absolute and differential pressure of a flowing fluid in a fluid system, comprising the step(s) of:
configuring the fluid system so as to include a first pressure tap and a second pressure tap that are spaced from each other such that the second pressure tap is downstream of the first pressure tap in a direction of flow; providing an absolute pressure sense element and first fluidly coupling the absolute pressure sense element to one of the first or second pressure tap so as to thereby measure an absolute pressure representative of the flowing fluid at the respective pressure tap to which it is fluidly coupled; providing a differential pressure sense element and second fluidly coupling the differential pressure sense element to each of the first and second pressure taps so as to measure a differential pressure of the flowing fluid between the first and second pressure taps; and wherein said first and second fluidly coupling further includes disposing a non-compressible medium between the respective absolute and differential pressure sense elements and the respective first and second pressure taps.