Micro-electro-mechanical systems (MEMS) and corresponding manufacturing process

摘要

An embodiment of a micro-electro-mechanical system of the MEMS type comprising at least one micro-electro-mechanical device of the MEMS type and one junction with a duct suitable to being associated with an external apparatus. Said junction being a printed circuit board PCB comprising at least two layers with juxtaposed faces, a channel being present in at least one face of at least one of said at least two layers suitable for realizing the duct with the juxtaposition of the other face of at least another one of at least two layers.

主权项

1. A Micro-Electro-Mechanical System (MEMS), comprising:
at least one micro-electro-mechanical device of the MEMS type; a junction including a duct suitable to provide a fluidic connection between an external apparatus and the micro-electro-mechanical device through the duct; wherein said junction comprises a printed circuit board having the micro-electro-mechanical device mounted to the printed circuit board, the printed circuit board including:
a first layer having first and second conductive surfaces;a second layer disposed over the first layer and having a third conductive surface and a fourth opposite conductive surface that faces and is insulated from the first surface;a first duct disposed and extending substantially parallel and free from any obstruction, disposed between the first surface of the first layer and the fourth surface of the second layer, the duct having a cavity with a first opening through one of the second and third surfaces and the cavity having a second opening through one of the second and third surfaces, the first opening configured to provide a fluidic connection between the duct and the micro-electro-mechanical device and the second opening configured to receive an external apparatus and to provide a fluidic connection between the external apparatus and the duct to thereby provide a fluidic coupling between the micro-electro-mechanical device and the external apparatus through the duct.