发明名称 Scan mirrors for laser radar
摘要 Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.
申请公布号 US9638799(B2) 申请公布日期 2017.05.02
申请号 US201313840658 申请日期 2013.03.15
申请人 Nikon Corporation;Nikon Metrology NV 发明人 Goodwin Eric Peter;Smith Daniel G.;Cooper Alexander;Rezk Mina A.;Slotwinski Anthony R.;Hedges Thomas M.
分类号 G01S17/10;G02B26/10;G01S17/32;G01S7/481;G01S7/491;G01S17/66 主分类号 G01S17/10
代理机构 Klarquist Sparkman, LLP 代理人 Klarquist Sparkman, LLP
主权项 1. A beam pointing system, comprising: a first rotational stage configured to provide a rotation about a first axis; a second rotational stage coupled to the first rotational stage, and configured to provide a rotation about a second axis that is not parallel to the first axis; a rotatable optical element coupled to the second rotational stage; an optical system situated to provide a probe beam to the rotatable optical element; and a stationary optical system configured to be stationary with respect to rotations of the first rotational stage and the second rotational stage, wherein the stationary optical system includes a laser source configured to produce the probe beam and deliver the probe beam to the optical system situated to provide the probe beam to the rotatable optical element.
地址 Tokyo JP