| 发明名称 |
Single crystal micromechanical resonator |
| 摘要 |
A single crystal micromechanical resonator includes a suspended plate of lithium niobate or lithium tantalate. The suspended plate and a support structure are formed from a single crystal. |
| 申请公布号 |
US9641154(B2) |
申请公布日期 |
2017.05.02 |
| 申请号 |
US201615349593 |
申请日期 |
2016.11.11 |
| 申请人 |
Sandia Corporation |
发明人 |
Olsson Roy H.;Friedmann Thomas A.;Jensen Homeijer Sara;Wiwi Michael;Hattar Khalid Mikhiel;Clark Blythe;Bauer Todd;Van Deusen Stuart B. |
| 分类号 |
H03H9/54;H03H3/02;H03H9/02;H03H9/17;H03H9/205 |
主分类号 |
H03H9/54 |
| 代理机构 |
|
代理人 |
Finston Martin I. |
| 主权项 |
1. A single crystal micromechanical resonator comprising:
a resonating portion comprising a single X-cut or Y-cut crystal of lithium niobate or lithium tantalate; a support structure disposed below the resonating portion, wherein the resonating portion and the support structure are composed of the same single X-cut or Y-cut crystal; and a plurality of anchoring regions configured to suspend the resonating portion within the support structure, wherein a trench is disposed below and around the resonating portion. |
| 地址 |
Albuquerque NM US |
