Wafer mounting method and wafer inspection device

摘要

Disclosed is a method for mounting a wafer on a probe card. In the wafer mounting method, an extendable tubular member is placed to surround the probe card, the wafer is placed on a chuck top, the chuck top is supported by a movable stage, and the stage is moved toward the probe card together with the wafer and the chuck top to bring the chuck top into contact with the tubular member. After the chuck top is in contact with the tubular member, the stage is moved toward the probe card together with the wafer and the chuck top to bring the wafer into contact with the probe card and maintain a positional relationship of the stage, the wafer, and the chuck top. After the wafer is in contact with the probe card, a space surrounded by the chuck top, the tubular member, and the probe card is evacuated.

主权项

1. A wafer mounting method for mounting a wafer on a probe card having a plurality of contact terminals protruding toward the wafer, the wafer mounting method comprising:
placing an extendable tubular member which extends toward the wafer to surround the probe card; placing the wafer on a chuck top which is a thick plate member; supporting the chuck top by a movable stage moving between a plurality of testers arranged horizontally and each including the probe card and the tubular member; moving the stage toward the probe card together with the wafer and the chuck top so as to bring the chuck top into contact with the tubular member; after the chuck top is in contact with the tubular member, moving the stage toward the probe card together with the wafer and the chuck top so as to bring the wafer into contact with the probe card and maintain a positional relationship of the stage, the wafer, and the chuck top without evacuating air in a space surrounded by the chuck top, the tubular member, and the probe card; after the wafer is in contact with the probe card, evacuating the air in the space surrounded by the chuck top, the tubular member, and the probe card; and maintaining the stage apart from the chuck top while the wafer is being inspected.