Capacitive pressure transducer for measuring the pressure of a medium adjacent to the measuring cell

摘要

The invention relates to a capacitive pressure transducer for measuring the pressure of a medium adjacent to the pressure transducer, which has a resilient measuring diaphragm, of which the first side is at least partially in contact with the medium and of which the second side, which faces away from the medium, comprises a measuring electrode and, for measuring a temperature, a resistance element made of a material having a temperature dependent resistance. Furthermore, the pressure transducer has a base body, which is arranged to oppose the second side of the measuring diaphragm, with a counter electrode, which forms a measuring capacitance with the measuring electrode. According to the invention, the resistance element is formed as a resistive layer disposed between the second side of the measuring diaphragm and the measuring electrode.

主权项

1. A capacitive pressure transducer for measuring a pressure of a medium adjacent to the pressure transducer, comprising
a resilient measuring diaphragm, of which the first side is at least partially in contact with the medium and of which the second side, which faces away from the medium, comprises a measuring electrode, and, for measuring a temperature, a resistance element made of a material having a temperature dependent resistance; and a base body, which is arranged to oppose the second side of the measuring diaphragm, with a counter electrode, which forms a measuring capacitance with the measuring electrode, wherein the resistance element is formed as a resistive layer disposed between the second side of the measuring diaphragm and the measuring electrode, wherein the resistive layer and the measuring electrode are separated from each other by means of an insulating layer.