发明名称 |
MEMS device and method for manufacturing the MEMS device |
摘要 |
A MEMS device and a method for manufacturing a MEMS device are disclosed. In an embodiment the MEMS device comprises a support having a cavity therethrough and a membrane extended over the cavity of the support, wherein the membrane is at least partially reinforced by graphene. |
申请公布号 |
US9641949(B2) |
申请公布日期 |
2017.05.02 |
申请号 |
US201414320466 |
申请日期 |
2014.06.30 |
申请人 |
Infineon Technologies AG |
发明人 |
Massoner Johann |
分类号 |
H02N1/00;H04R31/00;H04R19/00;B81C1/00;H04R7/10 |
主分类号 |
H02N1/00 |
代理机构 |
Slater Matsil, LLP |
代理人 |
Slater Matsil, LLP |
主权项 |
1. A MEMS device comprising:
a support having a cavity therethrough; and a membrane arranged on the support such that the membrane extends over the cavity of the support, wherein the membrane is at least partially reinforced by graphene, wherein the membrane is arranged between the support and the graphene, and wherein the membrane is displaceable over the cavity. |
地址 |
Neubiberg DE |