MEMS driver

摘要

Systems and methods provide actuator control. Actuator control is provided via charge control as opposed to voltage control. A driver for driving an actuator can include a charge pump for injecting charge into one or more capacitive elements of the actuator. The driver can further include a capacitance detection aspect for detecting the capacitance of the capacitive elements of the actuator to determine positioning of the actuator.

主权项

1. A driver device, comprising:
a charge pump to generate voltage required to inject charge into an actuator; a charge sink through which the actuator can be discharged, wherein the charging and discharging of the actuator effectuates movement of the actuator; and a switch for operatively connecting the charge pump and the charge sink to the actuator; wherein stability of the actuator is increased by virtue of a charge control, wherein the actuator comprises a comb drive, wherein the comb drive is maintained in a stable position via an electrostatic force as a result of the charge control, a capacitance of the comb drive having an inverse relationship to the voltage, the electrostatic force adding to an electrostatic spring force associated with the comb drive, wherein an effective stiffness of the comb drive resulting from the added electrostatic force is approximately three times greater than an actual physical stiffness of the comb drive.