Method for determining a change in distance to a movable and reflective target by means of interferometer to determine if the movement of the reflective target is really executable

摘要

Embodiments of the invention relate to a method for determining a change in distance to a moving and reflective target. Embodiments of the invention can be performed by means of interferometry and may include the generation of laser radiation, the emission of the measurement radiation to the target, and the detection of at least part of the measurement radiation reflected at the target. In some embodiments, a superposition of the reflected measurement radiation with the reference radiation is generated and detected, an interferometer output variable is derived on the basis of the detected superposition, and/or a time-resolved output variable curve is produced from the derived interferometer output variable. In some embodiments, the output variable curve is continually checked in that the output variable curve is continually read out in a time-resolved manner.

主权项

1. A method for progressively determining a distance change to a movable and reflective target in an interferometric distance measurement, the method comprising:
emitting measurement radiation to the target, receiving of at least a part of the measurement radiation, which is reflected on the target, generating and detecting of a superposition of the reflected measurement radiation with a reference radiation, deriving of an interferometer output variable based at least on the detected superposition, wherein the interferometer output variable is dependent on a distance to the target, generating of a time-resolved output variable curve from the derived interferometer output variable, and ascertaining of the distance change based on the output variable curve, wherein a progressive checking of the output variable curve is performed in that
based on the output variable curve, at least one movement parameter, which relates to the direction of the measurement radiation, of a relative movement of the target is progressively derived,a progressive comparison of the movement parameter to a defined movement criterion of the target is performed, wherein the movement criterion specifies a relative movement of the target in the direction of the measurement radiation, which relative movement is assumed to be really executable, practically plausible, and empirical, andan item of information on the plausibility of the distance change is provided if the movement criterion is not fulfilled.