Wire bonding apparatus comprising an oscillator mechanism

摘要

A wire bonding apparatus comprises an ultrasonic transducer including a capillary, a flexible connecting frame having a first side to which the ultrasonic transducer is connected and at least one electrically-driven actuator which is connected to a second side of the flexible connecting frame that is opposite to the first side thereof, the actuator having a longitudinal actuation direction. An elongated slit located in the flexible connecting frame extends substantially transversely to the actuation direction of the at least one actuator to form at least one pivot point adjacent to an end of the slit about which the flexible connecting frame is rotatable when it is driven by the at least one actuator.

主权项

1. A wire bonding apparatus comprising:
an ultrasonic transducer including a capillary; a flexible connecting frame having a first side to which the ultrasonic transducer is connected; at least one electrically-driven actuator which is connected to a second side of the flexible connecting frame that is opposite to the first side thereof, the actuator having a longitudinal actuation direction; and an elongated slit, located in the flexible connecting frame, which extends substantially transversely to the actuation direction of the at least one actuator, the elongated slit having an entire length extending substantially transversely to the actuation direction of the at least one actuator, the entire length of the elongated slit being bounded by planar surfaces of the flexible connecting frame, the planar surfaces of the flexible connecting frame and the elongated slit extending through an entire thickness of the flexible connecting frame, the entire thickness of the flexible connecting frame extending between a third side of the flexible connecting frame and a fourth side of the flexible connecting frame, the entire thickness of the flexible connecting frame extending in a first direction perpendicular to a second direction between the first side of the flexible connecting frame and the second side of the flexible connecting frame, the third side of the flexible connecting frame defining a top of the flexible connecting frame in the first direction and the fourth side of the flexible connecting frame defining a bottom of the flexible connecting frame in the first direction, a portion of the flexible connecting frame not including the elongated slit being configured to form at least one pivot point adjacent to an end of the slit about which the flexible connecting frame is rotatable when it is driven by the at least one actuator.