Probe card and inspection device

摘要

A probe card comes in touch with a test object to perform an inspection. The probe card contains: a probe substrate provided with a plurality of probes on the first surface and a plurality of anchor receiving portions on the second surface; and a supporting body disposed to support the periphery of the probe substrate, with at least a plurality of anchor receiving portions located within a probe existence region being arranged regularly and at an equal distance from each other on the second surface of the probe substrate.

主权项

1. A probe card to perform an inspection by coming in contact with a test object, comprising:
a probe substrate having a first surface and a second surface; a plurality of probes arranged on the first surface; a plurality of anchor receiving portions arranged on the second surface; a supporting body disposed to abut and support a periphery of the probe substrate; and a probe existence region that is defined on the second surface of the probe substrate and contains anchor receiving portions, wherein those anchor receiving portions within the probe existence region are disposed regularly in such a manner that neighboring anchor receiving portions are arranged at substantially equal distances from each other, unit shapes are formed by a plurality of the neighboring anchor receiving portions, and each of the unit shapes has a substantially equal area.