Terahertz wave detecting device, camera, imaging apparatus, and measuring apparatus

摘要

A terahertz wave detecting device includes: a substrate; a first metal layer that is disposed above the substrate; a pyroelectric layer that is disposed on the first metal layer; and a second metal layer that is disposed on the pyroelectric layer, wherein the second metal layer has a periodic structure in which a unit structure is disposed in a predetermined period, and the pyroelectric layer absorbs terahertz waves being incident on the pyroelectric layer and converts the terahertz waves into heat and converts the converted heat into an electrical signal.

主权项

1. A terahertz wave detecting device comprising:
a substrate; a first metal layer that is disposed above the substrate; a pyroelectric layer that is disposed on the first metal layer; and a second metal layer that is disposed on the pyroelectric layer, wherein the second metal layer has a periodic structure in which a unit structure is disposed in a predetermined period, and wherein the pyroelectric layer absorbs terahertz waves being incident on the pyroelectric layer and converts the terahertz waves into heat and converts the converted heat into an electrical signal, wherein the first metal layer, the pyroelectric layer, and the second metal layer constitute a unit cell, wherein the unit cell is disposed in plural numbers, wherein the unit structure includes:
a region on the pyroelectric layer where the second metal layer is disposed, anda region on the pyroelectric layer where the second metal layer is not disposed, and wherein the unit cell is disposed in plural numbers having different widths of the region where the second metal layer is not disposed.