METHOD AND APPARATUS OF MASS FLOW CONTROLLING FOR USE IN INTEGRATED GAS DELIVERY SYSTEM

摘要

An apparatus of mass flow controlling for use in an integrated gas delivery system, comprising an input terminal, a sensor unit, an electromagnetic valve, and a control unit. The control unit comprises an A/D converter, a microprocessor, and a valve control circuit. The A/D converter converts a flow rate setting signal inputted by the input terminal into a first digital signal, and converts a flow rate detection signal outputted by the sensor unit into a second digital signal. The microprocessor further comprises a control module and a calculation module. The valve control circuit opens the electromagnetic valve according to the first control signal only, and further regulates an openness of the electromagnetic valve according to the first control signal and the second control signal. It is concluded that response time of the mass flow control apparatus of the present invention is shorten, and control quality is improved.

主权项

1. A mass flow control apparatus, comprising:
an input terminal used to input a flow rate setting signal; a sensor unit coupled to a fluid for sensing its flow rate and outputting a flow rate detection signal; an electromagnetic valve coupled to the fluid for regulating its flow rate; a control unit including:
an A/D converter converting the flow rate setting signal inputted by the input terminal into a first digital signal, and converting the flow rate detection signal outputted by the sensor unit into a second digital signal;a microprocessor coupled to the A/D converter for receiving the first digital signal outputted by the A/D converter and the second digital signal outputted by the A/D converter, or receiving the first digital signal inputted directly by the input terminal and the second digital signal outputted by the A/D converter;the microprocessor further including a control module used to generate and output a first control signal according to the corresponding first digital signal outputted by the A/D converter or inputted directly by the input terminal;the microprocessor also including a calculation module used to generate and output a second control signal by running a calculation for a difference in the first digital signal outputted by the A/D converter or inputted directly by the input terminal and the second digital signal outputted by the A/D converter;a valve control circuit coupled to the microprocessor for opening the electromagnetic valve according to the first control signal only, or regulating an openness of the electromagnetic valve according to the first control signal and the second control signal.