METHOD FOR OPERATING A MULTI-BEAM PARTICLE MICROSCOPE

摘要

A method includes: generating a multiplicity of particle beams such that the particle beams penetrate a predetermined plane side-by-side and have within a volume region around the predetermined plane in each case one beam focus; scanning a first region of the surface of an object with the particle beams and detecting first intensities of particles produced by the particle beams while setting an operating parameter of the multi-beam particle microscope; and determining first values of an object property based on the first intensities. The first values represent the object property within the first region, and the object property represents a physical property of the object. The method also includes determining a second value of the operating parameter for use for a second region of the surface based on the first values of the object property.

主权项

1. A method of operating a multi-beam particle microscope, the method comprising:
generating a multiplicity of particle beams so that the particle beams penetrate a predetermined plane side-by-side, each particle beam having one beam focus within a volume region around the predetermined plane; arranging a surface of an object at least partially within the volume region; scanning a first region of the surface with the particle beams and detecting first intensities of particles produced by the particle beams that are incident on the first region, while an operating parameter of the multi-beam particle microscope is set to a first value, and determining first values of an object property based on the first intensities, wherein the first values represent the object property within the first region, and the object property represents a physical property of the object.