发明名称 MASK PLATE, METHOD OF MANUFACTURING ARRAY SUBSTRATE, AND ARRAY SUBSTRATE
摘要 The present disclosure discloses a mask plate, a method of manufacturing a corresponding array substrate, and an array substrate, used in the technical field of liquid crystal displays. The mask plate comprises a non-transparent area and a transparent area. The non-transparent area has an intermediate vertical trunk, an intermediate horizontal trunk, and branches extending from the intermediate vertical trunk and the intermediate horizontal trunk. The intermediate vertical trunk and the intermediate horizontal trunk form certain angles with the branches, respectively. The transparent area has a first transparent portion provided between the branches. The first transparent portion is provided with an optical interference unit, which is used for processing light with a first intensity into light with a second intensity, the first intensity being higher than the second intensity. A second transparent portion is used for directly introducing light with the first intensity to form a contact hole on an array substrate to be formed through the mask plate. The present disclosure further comprises a method of manufacturing an array substrate using the mask plate, and an array substrate thus manufactured. According to the present disclosure, both the aperture ratio of a pixel unit and transmittance of the liquid crystal panel can be improved.
申请公布号 US2017117307(A1) 申请公布日期 2017.04.27
申请号 US201414416831 申请日期 2014.08.05
申请人 SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD. 发明人 SHIH Ming Hung;JIANG Jiali
分类号 H01L27/12;G03F1/38 主分类号 H01L27/12
代理机构 代理人
主权项 1. A mask plate, comprising: a non-transparent area, which has an intermediate vertical trunk, an intermediate horizontal trunk, and branches extending from the intermediate vertical trunk and the intermediate horizontal trunk, the intermediate vertical trunk and the intermediate horizontal trunk forming angles with the branches, respectively; and a transparent area, which has a first transparent portion provided between the branches, wherein the first transparent portion is provided with an optical interference unit, which is used for processing light with a first intensity into light with a second intensity, the first intensity being higher than the second intensity.
地址 Shenzhen, Guangdong CN