| 发明名称 |
SEMICONDUCTOR WAFER WEIGHING APPARATUS AND METHODS |
| 摘要 |
A semiconductor wafer weighing apparatus comprises: a weight force measuring device for measuring a weight force of a semiconductor wafer; and control means configured to control an operation of the apparatus based on detection of acceleration of the apparatus or of a semiconductor wafer loaded on the apparatus by a detector for detecting acceleration of the apparatus or of a semiconductor wafer loaded on the apparatus; wherein: the control means is arranged to determine an error in the output of the weight force measuring device caused by an acceleration of the apparatus or of a semiconductor wafer loaded on the apparatus, using a predetermined relationship that matches the error in the output of the weight force measuring device to acceleration of the apparatus or of a semiconductor wafer loaded on the apparatus for different accelerations of the apparatus or of a semiconductor wafer loaded on the apparatus. |
| 申请公布号 |
US2017115158(A1) |
申请公布日期 |
2017.04.27 |
| 申请号 |
US201515301661 |
申请日期 |
2015.03.23 |
| 申请人 |
METRYX LIMITED |
发明人 |
WILBY Robert John;KIERMASZ Adrian |
| 分类号 |
G01G23/10;H01L21/67;H01L21/66;G01G17/00 |
主分类号 |
G01G23/10 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A semiconductor wafer weighing apparatus comprising:
a weight force measuring device for measuring a weight force of a semiconductor wafer; and control means configured to control an operation of the apparatus based on detection of acceleration of the apparatus or of a semiconductor wafer loaded on the apparatus by a detector for detecting acceleration of the apparatus or of a semiconductor wafer loaded on the apparatus; wherein: the control means is arranged to determine an error in the output of the weight force measuring device caused by an acceleration of the apparatus or of a semiconductor wafer loaded on the apparatus, using a predetermined relationship that matches the error in the output of the weight force measuring device to acceleration of the apparatus or of a semiconductor wafer loaded on the apparatus for different accelerations of the apparatus or of a semiconductor wafer loaded on the apparatus. |
| 地址 |
Almondsbury, Bristol GB |
