MASS FLOW RATE MEASUREMENT METHOD, THERMAL MASS FLOW METER USING SAID METHOD, AND THERMAL MASS FLOW CONTROLLER USING SAID THERMAL MASS FLOW METER

摘要

In a capillary heating type thermal type mass flow meter comprising a sensor configured to detect temperature and pressure of a fluid and a correction means configured to correct a mass flow rate based on said temperature and said pressure, change rates of the mass flow rate of the fluid with respect to temperature and pressure have been previously acquired, and the mass flow rate is corrected based on said temperature and said pressure as well as these change rates. Thereby, the mass flow rate can be measured accurately and simply even when the temperature and/or pressure of the fluid, whose mass flow rate is to be measured, change.