MEMS SENSOR DEVICE HAVING INTEGRATED MULTIPLE STIMULUS SENSING

摘要

A sensor device comprises a device structure and a cap coupled with the device structure to produce a cavity in which components of the sensor device are located. The device structure includes a substrate and a movable element spaced apart from a surface of the substrate. A port extends through the substrate underlying the movable element. A sense element is spaced apart from the movable element and is displaced away from the port. The movable element and the sense element form an inertial sensor to sense a motion stimulus as movement of the movable element relative to the sense element. An additional sense element together with a diaphragm spans across the port. The movable element and the additional sense element form a pressure sensor for sensing a pressure stimulus from an external environment as movement of the additional sense element together with the diaphragm relative to the movable element.

主权项

1. A microelectromechanical systems (MEMS) sensor device comprising:
a device structure comprising:
a substrate having a port extending through said substrate;a movable element positioned in spaced apart relationship above a surface of said substrate, said port underlying said movable element;a first sense element spaced apart from said movable element; anda second sense element spanning across said port, wherein said port exposes said second sense element to a stimulus from an external environment.