ENERGY-SENSITIVE RESIN COMPOSITION

摘要

An energy-sensitive resin composition that provides a highly transparent polybenzoxazole resin with suppressed coloring, which has excellent chemical resistance and excellent mechanical characteristics such as tensile elongation, even in cases where a polybenzoxazole precursor is thermally treated at low temperatures; a method for producing a polybenzoxazole film or polybenzoxazole molded body using the energy-sensitive resin composition; and a pattern forming method using the energy-sensitive resin composition. The energy-sensitive resin composition contains a polybenzoxazole precursor that is obtained by reacting an aromatic diaminediol with a diformyl compound or a dicarboxylic acid dihalide; a solvent; and a compound that is decomposed by the action of light and/or heat to generate a base and/or an acid.

主权项

1. An energy-sensitive resin composition, comprising:
a polybenzoxazole precursor obtained by reacting an aromatic diaminediol represented by the following formula (1) with a dicarbonyl compound represented by the following formula (2); a solvent; and a compound (A) which decomposes by the action of at least one of light and heat to generate at least one of a base and an acid: wherein Ra1 is a tetravalent organic group containing one or more aromatic rings, and with respect to two pairs of combinations of an amino group and a hydroxyl group contained in the aromatic diaminediol represented by the formula (1), the amino group and the hydroxyl group in each of the combinations are bonded to two carbon atoms adjacent to each other on the aromatic ring contained in Ra1; wherein Ra2 represents a divalent organic group, and A represents a hydrogen atom or a halogen atom.