SEMICONDUCTOR MANUFACTURING SYSTEM INCLUDING DEPOSITION APPARATUS

摘要

Provided is a semiconductor manufacturing system having an increased process window for stably and flexibly performing a deposition process. The semiconductor manufacturing system includes a gas supply device functioning as a first electrode and including a plurality of injection holes, a reactor wall connected to the gas supply device, and a substrate accommodating device functioning as a second electrode, the substrate accommodating device and the reactor wall being configured to be sealed together via face sealing. A reaction gas supplied from the gas supply device toward the substrate accommodating device is discharged to the outside through a gas discharge path between the gas supply device and the reactor wall. The first electrode includes a protruded electrode adjacent to an edge of the gas supply device.

主权项

1. A semiconductor manufacturing system comprising:
a gas supply device functioning as a first electrode and comprising a plurality of injection holes; a reactor wall connected to the gas supply device; and a substrate accommodating device functioning as a second electrode, the substrate accommodating device and the reactor wall being configured to be sealed via face sealing, wherein a reaction gas supplied from the gas supply device toward the substrate accommodating device is discharged to the outside through a gas discharge path between the gas supply device and the reactor wall, and wherein the first electrode comprises a protruded electrode adjacent to an edge of the gas supply device.