发明名称 Method for thinning samples
摘要 A method for thinning samples including the steps of: a) providing at least one sample having a front and a rear face, b) providing a frame substrate having a first face and a second face opposite the first, including a through-opening which opens into the first and second face, which is configured to receive the sample, c) positioning the sample so it is disposed in the through-opening, the front face being oriented to the same side as the first face, and d) thinning the frame substrate and the sample simultaneously from the first face and the front face, respectively, so that at the end of thinning, the faces extend substantially in the same plane, the thinning being carried out using a grinder, the frame substrate and the sample being disposed on a rotary disk held in place by aspiration, the flanks of the sample remaining free during the thinning.
申请公布号 US2017117158(A1) 申请公布日期 2017.04.27
申请号 US201615331490 申请日期 2016.10.21
申请人 COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES 发明人 DECHAMP Jérôme;MORICEAU Hubert;ZUSSY Marc
分类号 H01L21/306;H01L21/683;H01L21/304 主分类号 H01L21/306
代理机构 代理人
主权项
地址 Paris FR