DEVICE AND METHOD FOR GENERATING A VAPOR FOR A CVD OR PVD DEVICE FROM MULTIPLE LIQUID OR SOLID SOURCE MATERIALS

摘要

In a method and a device for generating vapor for a CVD or PVD device, liquid or solid particles of a first source material are fed into a first heat transfer body via a first feed line. The first heat transfer body vaporizes the particles into a first vapor, which is transported by a carrier gas from the first heat transfer body into a second heat transfer body arranged after the first heat transfer body. The first heat transfer body is heated to a first temperature, and the second heat transfer body is heated to a second temperature. Liquid or solid particles of a second source material are fed into a second heat transfer body via a second feed line. The second heat transfer body vaporizes the particles into a second vapor, which is transported along with the first vapor out of the second heat transfer body by the carrier gas.

主权项

1. A method for generating a vapor in a chemical vapor deposition (CVD) or physical vapor deposition (PVD) device, the method comprising:
vaporizing liquid or solid particles of a first source material into a first vapor, wherein the particles of the first source material are vaporized by bringing the particles of the first source material into contact with heat transfer surfaces of a first heat transfer body (1), which is heated to a first temperature; transporting by a carrier gas the first vapor out of the heat transfer body (1) in a direction of a flow of the carrier gas; transporting by the carrier gas the first vapor into a second heat transfer body (2), which is arranged downstream of the first heat transfer body (1) in the direction of the carrier gas flow, and is heated to a second temperature; feeding solid or liquid particles of a second source material into the second heat transfer body (2); vaporizing particles of the second source material into a second vapor, wherein the particles of the second source material are vaporized by bringing the particles of the second source material into contact with heat transfer surfaces of the second heat transfer body (2); and transporting by the carrier gas the second vapor along with the first vapor out of the second heat transfer body (2).