ACOUSTIC RESONATOR DEVICES AND METHODS PROVIDING PATTERNED FUNCTIONALIZATION AREAS

摘要

A micro-electrical-mechanical system (MEMS) resonator device includes a top side electrode overlaid with an interface layer including a material having a surface (e.g., gold or other noble metal, or a hydroxylated oxide) that may be functionalized with a functionalization (e.g., specific binding or non-specific binding) material. The interface layer and/or an overlying blocking material layer are precisely patterned to control locations of the interface layer available to receive a self-assembled monolayer (SAM), thereby addressing issues of misalignment and oversizing of a functionalization zone that would arise by relying solely on microarray spotting. Atomic layer deposition may be used for deposition of the interface layer and/or an optional hermeticity layer. Sensors and microfluidic devices incorporating MEMS resonator devices are also provided.

主权项

1. A micro-electrical-mechanical system (MEMS) resonator device comprising:
a substrate; a bulk acoustic wave resonator structure arranged over at least a portion of the substrate, the bulk acoustic wave resonator structure including a piezoelectric material, a top side electrode arranged over a portion of the piezoelectric material, and a bottom side electrode arranged between the piezoelectric material and the substrate, wherein a portion of the piezoelectric material is between the top side electrode and the bottom side electrode to form an active region; an interface layer arranged over at least a portion of the active region, wherein less than an entirety of the piezoelectric material is overlaid with interface layer material that is available to receive a self-assembled monolayer (SAM); and the self-assembled monolayer arranged over at least a portion of the interface layer.