Smart susceptor radiant heater

摘要

A radiant heater having a ferromagnetic element includes a high emissivity surface and an induction coil operatively coupled with the ferromagnetic element. The induction coil may be energized to create eddy currents heating the ferromagnetic element until the element reaches its Curie temperature. At the Curie temperature the ferromagnetic element becomes substantially nonmagnetic and the temperature of the element remains relatively constant. The high emissivity surface of the heater provides a substantially uniform radiant heat to an object in close proximity to the high emissivity surface. The object may be thermally coupled with the high emissivity surface of the radiant heater. The radiant heater having a high emissivity surface may be used to heat temperature sensitive objects such as thin films. Multiple radiant heaters having different Curie temperatures may be used to ramp up a temperature, ramp down a temperature, or provide different temperatures required during a process.

主权项

1. A system for heating an object, the system comprising:
a matrix, having a first surface and a second surface opposite the first surface, wherein the first surface is a high emissivity surface; a ferromagnetic element positioned within the matrix, the ferromagnetic element having a Curie temperature; an induction coil positioned within the matrix and operatively coupled with the ferromagnetic element; a power source in electrical communication with the induction coil, wherein application of power to the induction coil heats the ferromagnetic element and wherein the heating of the ferromagnetic element heats the matrix; and a thermally insulating structure connected to the second surface of the matrix.