Emitter for an electron beam, electron beam device and method for producing and operating an electron emitter

摘要

A cold field emitter for emitting an electron beam for an electron beam device is described. The emitter includes an emitter tip having a tip surface; and two or more adjacent facets formed at the tip surface and having facet boundaries, each of the facets forming a recess in the emitter tip, wherein the facets are separated. An intermediate area is provided between and around the two or more adjacent facets and the intermediate area is configured for electron emission. Further, an electron beam device, a method for operating an electron beam device and a method for producing an emitter for an electron beam device is described.

主权项

1. An electron beam device for inspecting a specimen with an electron beam, the electron beam device having an optical axis and comprising:
an electron beam source comprising a cold field emitter for emitting a primary electron beam, the cold field emitter comprising:
an emitter tip having an emitter tip surface; andtwo or more adjacent facets formed at the emitter tip surface, each of the two or more facets forming a recess in the emitter tip, wherein the two or more facets are separated;wherein an intermediate area is provided between and around the two or more adjacent facets, wherein the intermediate area is configured for electron emission; the electron beam source further comprising an extractor device for applying an extraction voltage between the cold field emitter and the extractor device; the electron beam device further comprising: electron beam optics for directing and focusing the primary electron beam onto the specimen; and, a detector device for detecting secondary charged particles generated at an impingement or hitting of the primary electron beam on the specimen.