| 发明名称 | Apparatus for generating extreme ultraviolet light | ||
| 摘要 | An apparatus for generating extreme ultraviolet light includes a droplet generator which provides a droplet to react with light from a light source to generate extreme ultraviolet light, a droplet collector which collects the droplet, and a droplet detector which includes a plurality of pressure sensors, the pressure sensors detect a position of the droplet provided to the droplet collecting unit. | ||
| 申请公布号 | US9635749(B2) | 申请公布日期 | 2017.04.25 |
| 申请号 | US201614995398 | 申请日期 | 2016.01.14 |
| 申请人 | SAMSUNG ELECTRONICS CO., LTD. | 发明人 | Kim Sung-Joo;Heo Jin-Seok;Seo Do-Hyun;Lee Da-Hae;Lee Jae-Pil;Hwang Sung-Jo |
| 分类号 | H05G2/00;H01S3/223 | 主分类号 | H05G2/00 |
| 代理机构 | Lee & Morse, P.C. | 代理人 | Lee & Morse, P.C. |
| 主权项 | 1. An apparatus for generating extreme ultraviolet light, comprising: a droplet generator which provides a droplet to react with light from a light source to generate extreme ultraviolet light; a droplet collector which collects the droplet; and a droplet detector which includes a plurality of pressure sensors, the pressure sensors detect a position of the droplet provided to the droplet collector. | ||
| 地址 | Suwon-si. Gyeonggi-do KR | ||