Packaging devices and methods of manufacture thereof

摘要

Packaging devices and methods of manufacture thereof for semiconductor devices are disclosed. In some embodiments, a packaging device includes a contact pad disposed over a substrate, and a passivation layer disposed over the substrate and a first portion of the contact pad. A post passivation interconnect (PPI) line is disposed over the passivation layer and is coupled to a second portion of the contact pad. A PPI pad is disposed over the passivation layer. A transition element is disposed over the passivation layer and is coupled between the PPI line and the PPI pad. The transition element comprises a first side and a second side coupled to the first side. The first side and the second side of the transition element are non-tangential to the PPI pad.

主权项

1. A method of manufacturing a packaging device, the method comprising:
forming a plurality of contact pads over a substrate; forming a passivation layer over the substrate and the plurality of contact pads; etching an opening in the passivation layer to expose a first portion of each of the plurality of contact pads, wherein after the etching, a second portion of each of the plurality of contact pads remains covered by the passivation layer; forming a plurality of post passivation interconnect (PPI) lines over the passivation layer, a respective one of the plurality of PPI lines being coupled to the first portion of a respective one of the plurality of contact pads; forming a plurality of a PPI pads over the passivation layer, a respective one of the plurality of PPI pads being coupled to a respective one of the plurality of PPI lines, the plurality of PPI pads being arranged in an array; and forming a plurality of transition elements disposed over the passivation layer wherein each of the transition elements comprises a first side and a second side coupled to the first side, wherein the first sides and the second sides of the transition elements are non-tangential to the plurality of PPI pads, and wherein respective ones of the plurality of transition elements are coupled between each of the plurality of PPI lines and each of the plurality of PPI pads in corner regions of the array.