Vapor deposition of silicon-containing films using penta-substituted disilanes

摘要

Disclosed are methods of depositing silicon-containing films on one or more substrates via vapor deposition processes using penta-substituted disilanes, such as pentahalodisilane or pentakis(dimethylamino)disilane.

主权项

1. A thermal ALD method of depositing a silicon nitride film on a substrate, the method comprising:
a) Setting a reactor containing the substrate to a temperature ranging from approximately 450° C. to approximately 650° C. and a pressure ranging from approximately 0.1 to approximately 100 Torr (13 Pa to 1,333 Pa); b) Introducing a vapor of pentachlorodisilane into the reaction chamber to form a silicon-containing layer on the substrate; c) Reacting an nitrogen containing reactant with the silicon-containing layer to form a layer of the silicon nitride film having a thickness ranging from approximately 0.3 Å (0.03 nm) to approximately 2 Å (0.2 nm) and a refractive index ranging from approximately 1.8 to 2.1; and d) Repeating steps b) and c).