Touch panel and touch panel-equipped display device

摘要

An arrangement of a touch panel is provided that prevents corrosion of the lines and improves reliability. A touch panel includes: a substrate (10); a sensor electrode located on the substrate (10) and formed of an oxide conductive film; a line (161) electrically connected with the sensor electrode; and a protection film (14) provided over the line (161). The protection film (14) includes: a first protection sub-film (141) formed of silicon nitride; a second protection sub-film (142) located on the first protection sub-film (141), formed of silicon nitride and having a lower refractive index than the first protection sub-film (141); and a third protection sub-film (143) located on the second protection sub-film (142), formed of silicon nitride and having a higher refractive index than the second protection sub-film (142), wherein the second protection sub-film (142) has a thickness that is no smaller than the total thickness of the first protection sub-film (141) and the third protection sub-film (143).

主权项

1. A touch panel comprising:
a substrate; a sensor electrode located on the substrate and formed of an oxide conductive film; a line electrically connected with the sensor electrode; and a protection film provided over the line, the protection film including: a first protection sub-film formed of silicon nitride; a second protection sub-film located on the first protection sub-film, formed of silicon nitride and having a lower refractive index than the first protection sub-film; and a third protection sub-film located on the second protection sub-film, formed of silicon nitride and have a higher refractive index than the second protection sub-film, wherein the second protection sub-film has a thickness that is no smaller than the total thickness of the first and third protection sub-films, the film stress in the second protection sub-film is tensile, and the film stress in the protection film taken as a whole is tensile.