| 主权项 |
1. An apparatus, comprising:
a substrate; and an electromechanical systems (EMS) display element supported over the substrate, the EMS display element including:
an electrostatic actuator including:
a first beam electrode coupled to a first anchor;a second beam electrode coupled to a second anchor,wherein, the first and second anchors support the first and second beam electrodes over the substrate such that at least one of the first and second beam electrodes deforms towards the other in response to the application of a voltage across the first and second beam electrodes; anda shutter, including a conductive sidewall, and having a proximal level substantially parallel to the substrate and a distal level substantially parallel to the substrate, the distal level spaced from the substrate by a greater distance than the proximal level is spaced from the substrate, wherein the conductive sidewall comprises a majority of the second beam electrode and connects the proximal and distal levels, and wherein each of the proximal and distal levels couples to, and extends away from, the conductive sidewall, and wherein the shutter includes a perimeter edge and the conductive sidewall of the shutter is positioned within a projection of the perimeter edge of the shutter onto the substrate such that upon actuation of the electrostatic actuator, the perimeter edge of the shutter passes over or under at least a portion of the first beam electrode. |
