Gas optimization in a gas discharge light source

摘要

One or more operating characteristics of a light source are adjusted by estimating a plurality of extreme values of operating parameters of the light source while operating the light source under a set of extreme test conditions. For each extreme test condition, a group of pulses of energy is supplied to a first gas discharge chamber of the light source while operating the first gas discharge chamber under the extreme test condition to produce a first pulsed amplified light beam; a group of pulses of energy is supplied to a second gas discharge chamber of the light source while operating the second gas discharge chamber under the extreme test condition to produce a second pulsed amplified light beam. An extreme value of an operating parameter for the extreme test condition is measured to thereby estimate the extreme value of the operating parameter.

主权项

1. A method of adjusting one or more operating characteristics of a light source comprising a first stage with a first gas discharge chamber filled with a first gas mixture and including a first pulsed energy source and a second stage with a second gas discharge chamber filled with a second gas mixture and including a second pulsed energy source, the method comprising:
estimating a plurality of extreme values of operating parameters of the light source while operating the light source under a set of extreme test conditions, the estimating comprising, for each extreme test condition:
supplying a group of pulses of energy to the first gas discharge chamber while operating the first gas discharge chamber under the extreme test condition to produce a first pulsed amplified light beam from the first stage that is directed to the second stage;supplying a group of pulses of energy to the second gas discharge chamber while operating the second gas discharge chamber under the extreme test condition and while the first pulsed amplified light beam is input to the second gas discharge chamber to produce a second pulsed amplified light beam; andmeasuring an extreme value of an operating parameter for the extreme test condition; determining whether to adjust at least one operating characteristic of the light source out of a plurality of operating characteristics based on the estimated plurality of extreme values of operating parameters; and if it is determined that an operating characteristic should be adjusted, then adjusting that operating characteristic.