| 发明名称 | Suppression of spurious modes of vibration for resonators and related apparatus and methods | ||
| 摘要 | Suppression of spurious modes of vibration for resonators and related apparatus and methods. A device may include a MEMS resonating structure, a substrate, and anchors between the MEMS resonating structure and the substrate. The MEMS resonating structure may have at least one main eigenmode of vibration and at least one spurious eigenmode of vibration. The anchors may be configured to suppress the response of the at least one spurious mode of vibration. | ||
| 申请公布号 | US9634227(B1) | 申请公布日期 | 2017.04.25 |
| 申请号 | US201414199103 | 申请日期 | 2014.03.06 |
| 申请人 | Analog Devices, Inc. | 发明人 | Thalmayr Florian;Kuypers Jan H. |
| 分类号 | H01L41/053 | 主分类号 | H01L41/053 |
| 代理机构 | Wolf, Greenfield & Sacks, P.C. | 代理人 | Wolf, Greenfield & Sacks, P.C. |
| 主权项 | 1. A device comprising: a micro-electromechanical (MEMS) resonating structure, a substrate, and anchors between the MEMS resonating structure and the substrate, wherein the MEMS resonating structure has at least one main eigenmode of vibration and at least one spurious eigenmode of vibration differing from the at least one main eigenmode of vibration, and wherein at least one anchor of the anchors comprises a plurality of repeating rectangular units defining for the anchor an eigenmode of vibration substantially matching the at least one spurious eigenmode of vibration of the MEMS resonating structure. | ||
| 地址 | Norwood MA US | ||