Electron beam microscope with improved imaging gas and method of use

摘要

Charged particle beam imaging and measurement systems are provided using gas amplification with an improved imaging gas. The system includes a charged particle beam source for directing a charged particle beam to work piece, a focusing lens for focusing the charged particles onto the work piece, and an electrode for accelerating secondary electrons generated from the work piece irradiation by the charged practice beam, or another gas cascade detection scheme. The gas imaging is performed in a high pressure scanning electron microscope (HPSEM) chamber for enclosing the improved imaging gas including CH3CH2OH (ethanol) vapor. The electrode accelerates the secondary electrons though the CH3CH2OH to ionize the CH3CH2OH through ionization cascade to amplify the number of secondary electrons for detection. An optimal configuration is provided for use of the improved imaging gas, and techniques are provided to conduct imaging studies of organic liquids and solvents, and other CH3CH2OH-based processes.

主权项

1. A method of forming a charged particle beam image of a work piece, comprising:
scanning a charged particle beam over a work piece surface, the charged particle beam causing the emission of secondary electrons to produce secondary electron signals at points along the scan; amplifying the secondary electron signals by accelerating the secondary electrons through a region including CH3CH2OH, the secondary electrons initiating an ionization cascade of the CH3CH2OH; detecting the amplified imaging signals; and forming an image of the work piece from the amplified imaging signals.