发明名称 |
Electronic component and method for manufacturing electronic component |
摘要 |
An electronic component that includes a resistive element. A Ni concentration of a resistive thin film of the resistive element at a side where there is a connection interface with a connection electrode is higher than the concentration of Ni at the side opposite to the interface. |
申请公布号 |
US9633795(B2) |
申请公布日期 |
2017.04.25 |
申请号 |
US201615209957 |
申请日期 |
2016.07.14 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
Ashimine Tomoyuki |
分类号 |
H01C1/02;H01G7/06;C23C14/20;H01C7/00;H01L21/822;H01L23/522;H01L21/768;H01L27/04;C23C14/58;H01L23/498 |
主分类号 |
H01C1/02 |
代理机构 |
Arent Fox LLP |
代理人 |
Arent Fox LLP |
主权项 |
1. A resistive element comprising:
a resistive film having Ni, Cr and Si as main components thereof; and a connection electrode electrically connected to the resistive film, the connection electrode having Ni as a main component, wherein a first Ni concentration in the resistive film at a first side thereof having a connection interface with the connection electrode is higher than a second Ni concentration at a second side opposite to the first side. |
地址 |
Nagaokakyo-Shi, Kyoto-Fu JP |