Sheet resistance measuring method

摘要

The present disclosure relates to a sheet resistance measuring method, comprising the following steps: connecting at least one to-be-measured thin film having a predetermined shape to two separate electrodes in at least one pair of electrodes; measuring the resistance between the two electrodes in each pair of electrodes; and determining the sheet resistance of the to-be-measured thin film based on the measured resistance and the shape of the corresponding to-be-measured thin film.

主权项

1. A sheet resistance measuring method, comprising the following steps:
connecting two separate electrodes of each of at least one pair of electrodes using a corresponding one of at least one to-be-measured thin film having a predetermined shape, wherein an edge of each electrode where the corresponding to-be-measured thin film is connected has a length not less than a width of a connected end of the corresponding to-be-measured thin film where the electrode is connected; measuring a resistance between the two electrodes of each of the at least one pair of electrodes; and determining the sheet resistance of the to-be-measured thin film based on the measured resistance and the shape of the corresponding to-be-measured thin film, wherein after the step of connecting the two separate electrodes of each of the at least one pair of electrodes, the method further comprises forming a protective layer covering the electrodes and the to-be-measured thin film, and subjecting the protective layer to a via process at positions of the electrodes to respectively form vias to expose the respective electrodes, and wherein the step of measuring the resistance between the two electrodes of each of the at least one pair of electrodes comprises measuring the resistance between the two electrodes of each pair of electrodes through the vias.