Gyroscope structure and gyroscope with improved quadrature compensation

摘要

A microelectromechanical gyroscope structure that comprises a seismic mass, a body element, and a spring structure suspending the seismic mass to the body element. In primary oscillation at least part of the seismic mass oscillates in out-of-plane direction. A first conductor is arranged to move with the seismic mass, and a second conductor is attached to the body element. The conductors include adjacent surfaces that extend in the first direction and the third direction. A voltage element is arranged to create between the first surface and the second surface a potential difference and thereby induce an electrostatic force in the second direction and modulated by the primary oscillation of the seismic mass.

主权项

1. A microelectromechanical gyroscope structure, comprising:
a seismic mass; a body element; a spring structure suspending the seismic mass to the body element to allow a primary oscillation where at least part of the seismic mass is excited to oscillation in a first direction, and a secondary oscillation where at least part of the seismic mass moves in a second direction that is perpendicular to the first direction, and the seismic mass comprises a surface plane that extends planarly in the second direction and in a third direction, wherein the third direction is perpendicular to the first direction and the second direction; a first conductor arranged to move with the seismic mass, the first conductor including a first surface that extends on the seismic mass in the first direction and the third direction; a second conductor attached to the body element and including a second surface extending in the first direction and the third direction, and adjacent to the first surface; a voltage element arranged to create between the first surface and the second surface a potential difference thereby inducing an electrostatic force in the second direction, which electrostatic force is modulated by the primary oscillation of the seismic mass.