Angular velocity sensor with flexible parts providing different rigidities

摘要

Disclosed herein is an angular velocity sensor. The angular velocity sensor according to an embodiment of the present invention is configured to include a mass body, a first frame disposed at an outer side of the mass body so as to be spaced apart from the mass body, a first flexible part connecting the mass body to the first frame in an X-axis direction, a second flexible part connecting the mass body with the first frame in a Y-axis direction, a second frame disposed at an outer side of the first frame so as to be spaced apart from the first frame, a third flexible part connecting the first frame with the second frame in an X-axis direction, and a fourth flexible part connecting the first frame with the second frame in a Y-axis direction.

主权项

1. An angular velocity sensor, comprising:
a mass body; a first frame disposed around the mass body; a first flexible part connecting the mass body with the first frame in a first axis direction; a second flexible part connecting the mass body with the first frame in a second axis direction that is orthogonal to the first axis direction; a second frame disposed around the first frame; a third flexible part connecting the first frame with the second frame in the first axis direction; and a fourth flexible part connecting the first frame with the second frame in the second axis direction, wherein the first flexible part and the second flexible part are respectively configured to provide a first rigidity resisting rotation of the mass body with respect to the first frame relative to the first axis direction, and to provide a second rigidity resisting rotation of the mass body with respect to the first frame relative to the second axis direction, respectively, the first rigidity being greater than the second rigidity, and wherein the third flexible part and the fourth flexible part are respectively configured to provide a third rigidity resisting rotation of the first frame with respect to the second frame relative to the second axis direction, and to provide a fourth rigidity resisting rotation of the first frame with respect to the second frame relative to the first axis direction, respectively, the third rigidity being greater than the fourth rigidity.